Vacuum Pump For Explosive Applications
The OktaLine ATEX pumps feature proven Roots operation with the ATEX certification for use in potentially explosive applications. Vacuum pumps in this series are ideal for processes in explosive areas or for evacuating explosive gases according to the ATEX directive (94/9/EC) in chemical and process technology applications, industrial applications, coating, the semiconductor industry and research & development. Depending on the application, vacuum pump users can choose between equipment category 2 and 3. All pumps are suitable for temperature class T3 and have very low leakage rates of less than 7.5x10-9 Torr l/s. Pumps in the series are resistant to pressure surges of up to 1,600 kPa (12,000 Torr). In addition, use of the magnetic coupling prevents a gas exchange between process related internal and external atmosphere. The line covers pumping speeds from 280 m³/h to 5,190 m³/h (165 CFM to 3055 CFM).
Pfeiffer Vacuum North America