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Gas Flow Valves for Sputtering Applications

Fri, 10/15/2010 - 12:22pm

Key High Vacuum Products Inc.’s PEV-1 Piezoelectric Gas Flow ValvesKey High Vacuum Products Inc.’s PEV-1 Piezoelectric Gas Flow Valves are high precision valves intended for use with inert gases typically used in sputtering applications. These piezoelectric valves:

  • Respond directly with a precise linear flow rate, which is governed by a DC voltage signal (0-100 VDC).
  • Have a response time within milliseconds.
  • Are fail safe with a thru put of 0-525 sccm or better.

www.keyhigh.com

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