Gas Flow Valves for Sputtering Applications
Key High Vacuum Products Inc.’s PEV-1 Piezoelectric Gas Flow Valves are high precision valves intended for use with inert gases typically used in sputtering applications. These piezoelectric valves:
- Respond directly with a precise linear flow rate, which is governed by a DC voltage signal (0-100 VDC).
- Have a response time within milliseconds.
- Are fail safe with a thru put of 0-525 sccm or better.